MEMS (Mechanical Engineering)
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Title: MEMS (Mechanical Engineering)
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Pages: 488
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as
a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. The first
volume, MEMS: Introduction and Fundamentals builds the required background and explores various
physical considerations of MEMS. Topics include scaling, simulation models, the basics of control
theory, and the physics of materials flow, thin liquid films, and bubble/drop transport. New chapters
in this edition address lattice Boltzmann simulations and microscale hydrodynamics. Standing well on
its own, this books builds an outstanding foundation for further exploration of MEMS and their
applications.
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