[PDF] Heteroepitaxy of Semiconductors: Theory, Growth, and Characterization

ISBN: 0849371953

Category: Tutorial


Posted on 2018-01-02, by luongquocchinh.

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Author: John E. Ayers | Publisher: CRC Press | Category: Other Engineering | Language: English | Page: 480 | ISBN: 0849371953 | ISBN13: 9780849371950 |

Description: This is the first comprehensive, fundamental introduction to the field of Semiconductors. This book reflects current understanding of nucleation, growth modes, relaxation of strained layers, and dislocation dynamics without emphasizing any particular material. The book provides in-depth descriptions of mismatched heteroepitaxy and lattice strain relaxation, various characterization tools used to monitor and evaluate the growth process, and finally, defect engineering approaches. Numerous examples highlight the concepts while extensive micrographs, schematics of experimental setups, and graphs illustrate the discussion.

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