[PDF] Measurement Technology for Micro-Nanometer Devices

ISBN: 1118717961

Category: Tutorial


Posted on 2018-01-04, by luongquocchinh.

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Author: Wendong Zhang | Publisher: Wiley | Category: Other Engineering | Language: English | Page: 352 | ISBN: 1118717961 | ISBN13: 9781118717967 |

Description: by Wendong Zhang (Author), Xiujian Chou (Author), Tiekin Shi (Author), Zongmin Ma (Author), Haifei Bao (Author), Jingdong Chen (Author), Liguo Chen (Author), Dachao Li (Author), Chenyang Xue (Author) A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience

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